求助一篇JJAP期刊的文献(MEMS相关) Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist作者:Yoon,Jun-Bo; Han,Chul-Hi; Yoon,Euisik; Kim,Choong-KiDOI:10.1143/JJAP.37
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求助一篇JJAP期刊的文献(MEMS相关) Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist作者:Yoon,Jun-Bo; Han,Chul-Hi; Yoon,Euisik; Kim,Choong-KiDOI:10.1143/JJAP.37
求助一篇JJAP期刊的文献(MEMS相关)
Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist
作者:Yoon,Jun-Bo; Han,Chul-Hi; Yoon,Euisik; Kim,Choong-Ki
DOI:10.1143/JJAP.37.7081
出版时间:12/1998
求助一篇JJAP期刊的文献(MEMS相关) Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist作者:Yoon,Jun-Bo; Han,Chul-Hi; Yoon,Euisik; Kim,Choong-KiDOI:10.1143/JJAP.37
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Monolithic Fabrication of Electroplated Solenoid Inductors Using Three-Dimensional Photolithography of a Thick Photoresist