英语翻译支撑体由刚度高的多孔质静压空气轴承提供气浮支撑,采用如陶瓷类的多孔质体材料.因为气浮平台作为纳米级的超精密定位系统,因此,在气浮平台进给机构主体材料时,必须要考虑主

英语翻译支撑体由刚度高的多孔质静压空气轴承提供气浮支撑,采用如陶瓷类的多孔质体材料.因为气浮平台作为纳米级的超精密定位系统,因此,在气浮平台进给机构主体材料时,必须要考虑主
英语翻译
支撑体由刚度高的多孔质静压空气轴承提供气浮支撑,采用如陶瓷类的多孔质体材料.因为气浮平台作为纳米级的超精密定位系统,因此,在气浮平台进给机构主体材料时,必须要考虑主体材料对于控制精度的影响,花岗岩以其良好的特性越来越多的得到人们的重要.花岗岩力学稳定性好,经过亿万年的天然力学平衡,其内应力基本上消失,内部结构稳定,能够长期保持较好的稳定性.花岗岩自身形状受温度影响非常小,热膨胀系数非常小,导热率也较低,因此对于周围环境的要求较低,同时花岗岩易于加工,吸震性好.相对于金属制品,不用考虑生锈,腐蚀等其他因素的影响.该设计采用花岗岩作为气浮台主要材料,按照气浮机构进行加工,可以得到比较稳定的气浮机构,实现压缩空气从多孔质体喷出时将超精密加工实验台均匀浮起的悬浮系统.其悬浮工作原理是具有一定压力的压缩空气通过多孔质体材料的微小小孔喷向位于多孔质体材料上方的平板,并通过多孔质体表面和平板之间的缝隙排向大气,由于压缩空气喷射到平板表面产生一定的悬浮力,当悬浮力与实验平台重量平衡时,这个运动平台处于稳定悬浮状态.当作为系统负载的平板发生变化或者有外界干扰时,系统本身通过改变多孔质体表面和平板之间的缝隙量改变悬浮力达到重新平衡；具有一定的自主调节能力.多孔质体材料由金属连接件固定其下部设置容腔用于稳定进入多孔质体材料压缩气体的压力.多孔质体空气静压轴承的原理如图1：

英语翻译支撑体由刚度高的多孔质静压空气轴承提供气浮支撑,采用如陶瓷类的多孔质体材料.因为气浮平台作为纳米级的超精密定位系统,因此,在气浮平台进给机构主体材料时,必须要考虑主
Support the body by the high stiffness of the porous air bearings for static air flotation support, using as a porous ceramic material. Because the flotation platform as the nano-scale ultra-precision positioning system, therefore, in the flotation platform, the main material feeding mechanism, must be considered the main material for the control of accuracy, the characteristics of granite, its good to get more and more people Important. Good mechanical stability of granite, after millions of years of natural mechanical balance, the internal stress largely disappeared, the internal structure is stable and can maintain a good long-term stability. Affected by temperature, the shape of granite itself is very small, very small thermal expansion coefficient, thermal conductivity is low, so low for the requirements of the surrounding environment, while granite easy processing, good shock absorption. Relative to the metal products, without regard to rust, corrosion and other factors. The design of the main air bearing table with granite as the material for processing by flotation body can be relatively stable flotation mechanism to achieve the compressed air emitted from the porous body when the ultra-precision machining bench even float the suspension system. The suspension works with a certain pressure of compressed air through the porous material playing in the tiny holes in porous materials above the plate, and through the porous surface and the gap between the plates to the atmosphere, due to compressed air Jet to the flat surface of a certain suspension force, levitation force when the weight balance with the experimental platform, the campaign platform in a stable suspension. When the plate as the system load changes or there is external interference, the system itself by changing the porous surface and the flat amount of change in the gap between the levitation force to re-balance; a certain self-adjustment ability. Porous material by the metal connectors fixed set of its lower volume cavity to stabilize the porous material into the compressed gas pressure. Porous static pressure air bearing principle of the body as shown in Figure 1: