英语翻译The electrically parallel connected resistance evaporators and the glowing electrode are arranged in the axis of an cylindrical vacuum chamber.The rotary cage bears the substrates to be coated (cases) and rotates around the evaporators.A
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英语翻译The electrically parallel connected resistance evaporators and the glowing electrode are arranged in the axis of an cylindrical vacuum chamber.The rotary cage bears the substrates to be coated (cases) and rotates around the evaporators.A
英语翻译
The electrically parallel connected resistance evaporators and the glowing electrode are arranged in the axis of an cylindrical vacuum chamber.The rotary cage bears the substrates to be coated (cases) and rotates around the evaporators.
A swiveling cover serves for time limiting of vapor deposition and therefore it essentially limits the thermal stress for the substrates.
The pumping unit evacuates the vacuum chamber to the required operational pressure.It is connected with a cryogenic pump to increase the water vapor displacement capacity (Meissner trap with belonging cooling unit)
英语翻译The electrically parallel connected resistance evaporators and the glowing electrode are arranged in the axis of an cylindrical vacuum chamber.The rotary cage bears the substrates to be coated (cases) and rotates around the evaporators.A
并联电阻蒸发器和发光电极安装在圆柱形真空室的轴线上.旋转笼装载需要镀层的基片(盒子),围绕蒸发器转动.
一旋转外罩作为蒸气沉积的时间限制,因而它实际上也就限制了基片的热载荷.
一抽气泵将真空室抽到所需的工作压力.它与一个冷冻泵相连以增加水蒸汽排放量(带有冷冻设备的迈斯纳冷阱)